• DocumentCode
    3596932
  • Title

    Progress in laboratory based X-ray microscopy

  • Author

    Ebensperger, Thomas ; Nachtrab, Frank ; Sukowski, Frank ; Hanke, Randolf

  • Author_Institution
    Lehrstuhl fur Rontgenmikroskopie, Julius-Maximilians-Univ. Wurzburg, Wurzburg, Germany
  • fYear
    2011
  • Firstpage
    13
  • Lastpage
    14
  • Abstract
    In recent years X-ray tomography has made progressive steps towards spatial resolution in the sub-micron range. A limiting factor is the finite focal spot size of state-of-the-art microfocus tubes. In this contribution we present a radiography setup with an X-ray source capable of generation focal spot sizes down to 80 nm, thanks to special targets designed using Monte Carlo simulations. Together with a high geometric magnification and a low-noise photon-counting detector this makes the setup ideal for material characterisation at the nanoscale.
  • Keywords
    Monte Carlo methods; X-ray microscopy; photon counting; Monte Carlo simulations; X-ray microscopy; X-ray source; X-ray tomography; finite focal spot size; high geometric magnification; low-noise photon-counting detector; material characterisation; microfocus tubes; radiography setup; spatial resolution; submicron range; Detectors; Photonics; Scanning electron microscopy; Transmission electron microscopy; Tungsten; X-ray imaging; Monte Carlo simulation; X-ray microscopy; X-ray source charakterization; nano radiography; transmission target optimization;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
  • ISSN
    pending
  • Print_ISBN
    978-1-4577-1243-2
  • Electronic_ISBN
    pending
  • Type

    conf

  • Filename
    6004538