Title :
Progress in laboratory based X-ray microscopy
Author :
Ebensperger, Thomas ; Nachtrab, Frank ; Sukowski, Frank ; Hanke, Randolf
Author_Institution :
Lehrstuhl fur Rontgenmikroskopie, Julius-Maximilians-Univ. Wurzburg, Wurzburg, Germany
Abstract :
In recent years X-ray tomography has made progressive steps towards spatial resolution in the sub-micron range. A limiting factor is the finite focal spot size of state-of-the-art microfocus tubes. In this contribution we present a radiography setup with an X-ray source capable of generation focal spot sizes down to 80 nm, thanks to special targets designed using Monte Carlo simulations. Together with a high geometric magnification and a low-noise photon-counting detector this makes the setup ideal for material characterisation at the nanoscale.
Keywords :
Monte Carlo methods; X-ray microscopy; photon counting; Monte Carlo simulations; X-ray microscopy; X-ray source; X-ray tomography; finite focal spot size; high geometric magnification; low-noise photon-counting detector; material characterisation; microfocus tubes; radiography setup; spatial resolution; submicron range; Detectors; Photonics; Scanning electron microscopy; Transmission electron microscopy; Tungsten; X-ray imaging; Monte Carlo simulation; X-ray microscopy; X-ray source charakterization; nano radiography; transmission target optimization;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2011 24th International
Print_ISBN :
978-1-4577-1243-2
Electronic_ISBN :
pending
