Smoother Mo films for molded FEAs by addition of N2 to Ar sputter gas

Molybdenum field emitter arrays (FEAs) fabricated by molding and a self-aligned gate process have been successfully used to fabricate stacked-double-gate FEAs, and to demonstrate high-acceleration field compatibility, and near infrared laser-induced field-emission. For higher brightness cathodes, we are currently developing nanoscale (300nm emitters, 750 nm pitch) molded molybdenum FEAs. As emitter dimensions approach the grain size for sputtered molybdenum films, roughness in the metal grain structure, for example due to self-shadowing when coating topographic features, becomes increasingly significant for the FEA structures.