DocumentCode
3597113
Title
Nanostructured Integrated Electron Source
Author
Schoessler, C. ; Koops, H.W.P.
Author_Institution
Deutsche Telekom AG Technologiezentrum, Germany
fYear
1997
Firstpage
772
Lastpage
777
Keywords
Brightness; Capacitance; Crystals; Electron beams; Electron sources; Joining processes; Lithography; Resistors; Transmission electron microscopy; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627695
Filename
627695
Link To Document