Title :
Novel electrode configurations of bulk acoustic wave resonators for liquid sensing applications
Author :
Zhang, Chao ; Vetelino, John F.
Author_Institution :
Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA
fDate :
10/1/2000 12:00:00 AM
Abstract :
A variety of quartz thickness shear mode (TSM) resonant sensors with different electrode configurations have been designed, fabricated and tested in liquids for probing the electrical property changes. The resonance frequency of the sensors was found to have more than an order of magnitude increase in sensitivity over the standard AT cut quartz resonant sensor. The increase in sensitivity is due to the ability of the sensors to detect changes in the electrical properties in the liquid
Keywords :
acoustic resonators; bulk acoustic wave devices; chemical sensors; crystal resonators; electrodes; quartz; SiO2; bulk acoustic wave resonator; electrical properties; electrode configuration; liquid sensor; quartz thickness shear mode resonant sensor; resonance frequency; sensitivity; Acoustic waves; Chemical and biological sensors; Electrodes; Frequency measurement; Liquids; Mechanical factors; Mechanical sensors; Oscillators; Resonance; Resonant frequency;
Conference_Titel :
Ultrasonics Symposium, 2000 IEEE
Print_ISBN :
0-7803-6365-5
DOI :
10.1109/ULTSYM.2000.922586
