Integrated microchannels with metallic and polymeric channel sections

In this paper a fabrication technology for manufacturing networks of integrated, batch fabricated, surface micromachined channels which combine polymeric and metallic channel sections is presented. This technology is generic and can be used to fabricate microchannels out of a variety of polymeric and metallic materials. Microchannels which have been fabricated thus far have included copper and gold as metallic channels and polyimide, acrylic, polycarbonate, polystyrene, PVC, and ABS as insulating materials. The dimensions of these channels range from 1-3 cm in length, 250-1000 μm in width, and 10-50 μm in height. This fabrication technology is an IC compatible process, allowing for the integration of signal processing and control circuitry on the same chip. In addition, the process can be implemented on polymeric substrates to produce batch fabricated plastic microchannels