DocumentCode
3598202
Title
Investigation of the LIGA process to fabricate microchannel plates
Author
Liu, Robin H. ; Vasile, Michael J. ; Goettert, Jost ; Beebe, David J.
Author_Institution
Illinois Univ., Urbana, IL, USA
Volume
1
fYear
1997
Firstpage
645
Abstract
This paper describes the development of microchannel plate prototypes with aspect ratios of 20:1 and a variety of microchannel geometries. The LIGA process is utilized to fabricate nickel molds up to 150 μm in height with planarized surfaces. A novel application of spin-on glass is developed to obtain glass structures in Ni molds. A reverse electroplating is used to remove the Ni mold and release the glass structures with height of more than 100 μm
Keywords
X-ray lithography; electroforming; electron multipliers; electroplating; microchannel plates; sol-gel processing; 100 to 150 micron; LIGA process; Ni; area vacuum-electron multiplier; aspect ratios; microchannel geometries; microchannel plates; planarized surfaces; reverse electroplating; spin-on glass; synchrotron radiation lithography; Dry etching; Electrons; Geometry; Glass; Microchannel; Nickel; Night vision; Space technology; X-ray detection; X-ray detectors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613734
Filename
613734
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