Thickness-dependent magnetic properties of patterned FeCoBSi amorphous thin films on silicon substrate

With the rapid development of high frequency and microwave technology, soft magnetic thin film with high saturation magnetization and high permeability, has been intensively studied in the several decades. In recent years, many research effort have been placed on the controlling of resonance frequency (f_r)^[1-3]. One of the useful ways to tuning the f_r is by patterning the magnetic thin film into periodic strip structure^[4-6]. But in previous studies, there have paid no attention to how the thickness influences the magnetic properties of strip patterned film in details. In addition, we believed that the fringe morphology of strips, usually be ignored, should be careful analysis.