• DocumentCode
    3598523
  • Title

    A further study of reduced-order modeling techniques for nonlinear MEMS beams

  • Author

    Juillard, Jerome ; Vidal-Alvarez, Gabriel ; Barniol, Nuria

  • Author_Institution
    CentraleSupelec, GEEPS, Gif-sur-Yvette, France
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    6
  • Abstract
    This paper gives a further look at reduced-order modeling (ROM) techniques that can be applied to MEMS beams subject to nonlinear forces. It is focused on the popular method which consists in multiplying the equation governing the displacement of the beam by the displacement-dependent denominator of the nonlinear (electrostatic) force before modal projection is performed. Having already shown that in the case of 1-mode, 1-harmonic analysis, this method can lead to dramatically wrong results, we propose another choice of multiplicative coefficient, with much improved behavior. This method is illustrated, discussed and compared to other approaches in terms of simplicity, accuracy and range of validity.
  • Keywords
    beams (structures); harmonic analysis; micromechanical devices; reduced order systems; ROM techniques; beam displacement; displacement-dependent denominator; electrostatic force; harmonic analysis; nonlinear MEMS beam; reduced-order modeling technique; Electrostatics; Frequency response; Harmonic analysis; Mathematical model; Micromechanical devices; Oscillators; Resonant frequency; Reduced-order modeling; electrostatic nonlinearity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on
  • Print_ISBN
    978-1-4799-8627-9
  • Type

    conf

  • DOI
    10.1109/DTIP.2015.7160983
  • Filename
    7160983