• DocumentCode
    3599492
  • Title

    Fluorinated polyimide waveguide fabricated using replication process with antisticking layer

  • Author

    Shioda, Tsuyoshi

  • Author_Institution
    Functional Materials Laboratory, Mitsui Chemicals, Inc., 580-32 Nagaura, Sodegaura, Chiba 299-0265, Japan; Tsuyoshi.Shioda@mitsui-chem.co.jp
  • Volume
    3
  • fYear
    2002
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A new replication process using a fluorinated polyimide was demonstrated. The waveguide using the replicated film exhibited low optical propagation losses of 0.3, 0.2 and 0.4 dB/cm at the wavelengths of 0.85, 1.31 and 1.55um, respectively.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communication, 2002. ECOC 2002. 28th European Conference on
  • Print_ISBN
    87-90974-63-8
  • Type

    conf

  • Filename
    1601161
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3599492