Title :
Properties of microwave discharge in Goubau transmission line
Author :
Yefimov, B.P. ; Khorunzhiy, M.O. ; Kuleshov, A.N.
Author_Institution :
Usikov Inst. of Radiophys. & Electron., Nat. Acad. of Sci. of Ukraine, Kharkov
Abstract :
Experimental results of microwave discharge excitation at the edge of single transmission line are presented. The device, which consists of a waveguide, a resonator and coaxial line for energy transmission to Goubau line, is described. The dynamics of plasma formation at the line edge is analyzed by photographic method. Measured discharge temperature allows us to consider plasma formation as erosive discharge that can be used in thin-film processing during the evaporation of heat-resistant material. We consider the mechanism of energy transmission in single line as an excitation of surface plasma polariton.
Keywords :
coaxial cables; high-frequency discharges; resonators; waveguides; Goubau transmission line; coaxial line; discharge temperature; heat-resistant materials; microwave discharge properties; photographic method; plasma formation; resonator; surface plasma polariton; thin-film processing; waveguide; Coaxial components; Electromagnetic heating; Microwave devices; Plasma devices; Plasma materials processing; Plasma measurements; Plasma temperature; Plasma waves; Temperature measurement; Transmission lines; Electrical discharge; fine-dispersed layers of refractory metals; metal sublimation process; single-conductor transmission line;
Conference_Titel :
Infrared and Millimeter Waves, 2007 and the 2007 15th International Conference on Terahertz Electronics. IRMMW-THz. Joint 32nd International Conference on
Print_ISBN :
978-1-4244-1438-3
DOI :
10.1109/ICIMW.2007.4516611