Title :
Advanced coatings for RF sources
Author :
Ives, R.L. ; Collins, George ; Falce, Lou ; Flannery, Matt ; Desai, Tappan
Author_Institution :
Calabazas Creek Res. Inc., San Mateo, CA, USA
Abstract :
Calabazas Creek Research, Inc. (CCR) and Advanced Cooling Technologies, Inc. (ACT) are developing advanced coating for RF sources and components to improve performance or address known issues. The research is currently focused on breakdown issues in electron guns and corrosion and erosion in copper cooling circuits.
Keywords :
coating techniques; cooling; copper; electron guns; ACT; CCR; Calabazas creek research inc; RF source; advanced coating; advanced cooling technologies inc; breakdown issue; copper cooling circuit; electron gun; Coatings; Cooling; Copper; Corrosion; Electrodes; Radio frequency; Surface treatment;
Conference_Titel :
Plasma Sciences (ICOPS), 2015 IEEE International Conference on
DOI :
10.1109/PLASMA.2015.7179929
