Title :
Elucidating the mechanism of nanocone and nanohole formation on Si by optical trap assisted nanopatterning
Author :
Ting-Hsuan Chen ; Yu-Cheng Tsai ; Fardel, Romain ; Arnold, Craig B.
Author_Institution :
Dept. of Mech. & Aerosp. Eng., Princeton Univ., Princeton, NJ, USA
Abstract :
Using optical trap-assisted nanopatterning (OTAN), we are able to control the formation of nanocones and nanoholes in Silicon. The effects are described by integrating FDTD and heat transfer modeling to account for the nanoscale features.
Keywords :
elemental semiconductors; finite difference time-domain analysis; nanofabrication; nanopatterning; nanophotonics; nanostructured materials; radiation pressure; semiconductor growth; silicon; FDTD modeling; Si; heat transfer modeling; nanocone formation; nanohole formation; nanoscale features; optical trap assisted nanopatterning; Charge carrier processes; Heat transfer; Nanopatterning; Optical films; Silicon; Surface morphology; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
