Title :
Development and Optimization of Durable Microelectrodes for Quantitative Electroanalysis in Molten Salt
Author :
Blair, Ewen O. ; Corrigan, Damion K. ; Terry, Jonathan G. ; Mount, Andrew R. ; Walton, Anthony J.
Author_Institution :
Scottish Microelectron. Centre, Univ. of Edinburgh, Edinburgh, UK
Abstract :
Microfabricated square electrodes with finely controlled highly reproducible dimensions have been developed for electrochemical analysis of high-temperature molten salt (MS). These microelectrodes have been fabricated using photolithographic techniques on silicon wafers and have been designed for operation in lithium chloride/potassium chloride eutectic salt at and ~500 °C. The electrodes are constructed from a series of patterned layers, and their development has involved a systematic study and optimization of a number of different material combinations. This has resulted in a process for making electrodes that represents a step change in capability, delivering the first robust microelectrode device capable of quantitative electroanalysis in a MS system at 500 °C.
Keywords :
electrochemical electrodes; electrolytes; lithium compounds; microfabrication; photolithography; potassium compounds; LiCl-KCl; durable microelectrode; eutectic salt; high-temperature molten salt; microfabricated square electrodes; photolithographic technique; quantitative electroanalysis; temperature 500 C; Insulators; Microelectrodes; Silicon compounds; Stress; Tungsten; Microelectrodes; high temperature; high temperature.; microfabrication; molten salt;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2015.2399106