• DocumentCode
    3601394
  • Title

    Development and Optimization of Durable Microelectrodes for Quantitative Electroanalysis in Molten Salt

  • Author

    Blair, Ewen O. ; Corrigan, Damion K. ; Terry, Jonathan G. ; Mount, Andrew R. ; Walton, Anthony J.

  • Author_Institution
    Scottish Microelectron. Centre, Univ. of Edinburgh, Edinburgh, UK
  • Volume
    24
  • Issue
    5
  • fYear
    2015
  • Firstpage
    1346
  • Lastpage
    1354
  • Abstract
    Microfabricated square electrodes with finely controlled highly reproducible dimensions have been developed for electrochemical analysis of high-temperature molten salt (MS). These microelectrodes have been fabricated using photolithographic techniques on silicon wafers and have been designed for operation in lithium chloride/potassium chloride eutectic salt at and ~500 °C. The electrodes are constructed from a series of patterned layers, and their development has involved a systematic study and optimization of a number of different material combinations. This has resulted in a process for making electrodes that represents a step change in capability, delivering the first robust microelectrode device capable of quantitative electroanalysis in a MS system at 500 °C.
  • Keywords
    electrochemical electrodes; electrolytes; lithium compounds; microfabrication; photolithography; potassium compounds; LiCl-KCl; durable microelectrode; eutectic salt; high-temperature molten salt; microfabricated square electrodes; photolithographic technique; quantitative electroanalysis; temperature 500 C; Insulators; Microelectrodes; Silicon compounds; Stress; Tungsten; Microelectrodes; high temperature; high temperature.; microfabrication; molten salt;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2015.2399106
  • Filename
    7046354