DocumentCode
3601394
Title
Development and Optimization of Durable Microelectrodes for Quantitative Electroanalysis in Molten Salt
Author
Blair, Ewen O. ; Corrigan, Damion K. ; Terry, Jonathan G. ; Mount, Andrew R. ; Walton, Anthony J.
Author_Institution
Scottish Microelectron. Centre, Univ. of Edinburgh, Edinburgh, UK
Volume
24
Issue
5
fYear
2015
Firstpage
1346
Lastpage
1354
Abstract
Microfabricated square electrodes with finely controlled highly reproducible dimensions have been developed for electrochemical analysis of high-temperature molten salt (MS). These microelectrodes have been fabricated using photolithographic techniques on silicon wafers and have been designed for operation in lithium chloride/potassium chloride eutectic salt at and ~500 °C. The electrodes are constructed from a series of patterned layers, and their development has involved a systematic study and optimization of a number of different material combinations. This has resulted in a process for making electrodes that represents a step change in capability, delivering the first robust microelectrode device capable of quantitative electroanalysis in a MS system at 500 °C.
Keywords
electrochemical electrodes; electrolytes; lithium compounds; microfabrication; photolithography; potassium compounds; LiCl-KCl; durable microelectrode; eutectic salt; high-temperature molten salt; microfabricated square electrodes; photolithographic technique; quantitative electroanalysis; temperature 500 C; Insulators; Microelectrodes; Silicon compounds; Stress; Tungsten; Microelectrodes; high temperature; high temperature.; microfabrication; molten salt;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2015.2399106
Filename
7046354
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