DocumentCode
3602274
Title
The Detachment Process and Release Efficiency of Polypyrrole/Gold Bilayer Actuators
Author
Vinh Ho ; Narenji, Alaleh Golkar ; Kulinsky, Lawrence ; Madou, Marc
Author_Institution
Intel Corp., Santa Clara, CA, USA
Volume
24
Issue
5
fYear
2015
Firstpage
1616
Lastpage
1621
Abstract
Polypyrrole/gold (PPy/Au) bilayer actuators are used in a wide variety of applications, from microrobotics to drug delivery. In this paper, we demonstrate that the operation efficiency of PPy/Au bilayer actuators is influenced by the actuators´ geometry. During actuation, the outer edges of the actuators detached first and the subsequent release progressed toward the center of the actuators. Rectangular-, circular-, and trapezoidal-shaped actuators were fabricated, and for a given area, actuators with a larger perimeter exhibited faster release than actuators with a smaller perimeter. In addition to experimental work, finite-element analysis was performed to model the interfacial stress responsible for bilayer release. Insights gained in this paper besides PPy/Au actuators can be applied to other types of detachable actuators.
Keywords
bioMEMS; finite element analysis; gold; microactuators; polymers; Au; actuator geometry; bilayer release; circular-shaped actuators; detachable actuators; detachment process; drug delivery; finite-element analysis; interfacial stress; microrobotics; polypyrrole-gold bilayer actuators; rectangular-shaped actuators; release efficiency; trapezoidal-shaped actuators; Actuators; Drug delivery; Geometry; Gold; Strain; Stress; Substrates; PPy/Au bilayer; Polypyrrole actuator; film detachment; geometry effects; geometry effects.;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2015.2427851
Filename
7109095
Link To Document