Performance Assessment of CMUT Arrays Based on Electrical Impedance Test Results

Author

Klemm, Markus ; Unamuno, Anartz ; Elsaber, Linus ; Jeroch, Werner

Author_Institution

Fraunhofer Inst. for Photonic Microsyst., Dresden, Germany

Volume

24

Issue

6

fYear

2015

Firstpage

1848

Lastpage

1855

Abstract

A quantitative quality assessment method for capacitive micromachined ultrasonic transducer (CMUT) arrays based on electrical impedance measurements made at wafer level is proposed. The resonant response in air of CMUTs is described and then used to obtain a quantitative quality value. Several issues that could occur in CMUT arrays as well as their effect on the output of the assessment are analyzed. This method has been applied on a wafer containing several CMUT designs and the obtained results are summarized.

Keywords

electric impedance measurement; micromechanical devices; ultrasonic transducer arrays; CMUT arrays; capacitive micromachined ultrasonic transducer arrays; electrical impedance measurements; quantitative quality assessment method; resonant response; wafer level; Coherence; Electrodes; Frequency measurement; Impedance; Impedance measurement; Q-factor; Resonant frequency; CMUT; array; coherence; impedance; lumped circuit analysis; lumped circuit analysis.; quality; wafer level test;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2015.2445937

Filename

7147768