• DocumentCode
    3604401
  • Title

    Erratum to “A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS” [DOI: 10.1109/JMEMS.2015.2432054]

  • Author

    Krijnen, Bram ; Swinkels, Koen R. ; Brouwer, Dannis M. ; Abelmann, Leon ; Herder, Just L.

  • Author_Institution
    , Demcon Advanced Mechatronics, Enschede, The Netherlands
  • Volume
    24
  • Issue
    5
  • fYear
    2015
  • Firstpage
    1659
  • Lastpage
    1659
  • Abstract
    In the above paper [1], references [32]–[38] were inadvertently removed and are as follows.
  • Keywords
    Actuators; Electrostatics; Kinematics; Position control;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2015.2452791
  • Filename
    7185336