DocumentCode
3604401
Title
Erratum to “A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS” [DOI: 10.1109/JMEMS.2015.2432054]
Author
Krijnen, Bram ; Swinkels, Koen R. ; Brouwer, Dannis M. ; Abelmann, Leon ; Herder, Just L.
Author_Institution
, Demcon Advanced Mechatronics, Enschede, The Netherlands
Volume
24
Issue
5
fYear
2015
Firstpage
1659
Lastpage
1659
Abstract
In the above paper [1] , references [32]–[38] were inadvertently removed and are as follows.
Keywords
Actuators; Electrostatics; Kinematics; Position control;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2015.2452791
Filename
7185336
Link To Document