Static Behavior of Closed-Loop Micromachined Levitated Two-Axis Rate Gyroscope

In this paper, a model of Micromachined Levitated Gyroscope (MLG) with a closed-loop control is developed. The model provides a fundamental theoretical description of the operating principle of the MLG. Employing the obtained model, different operating modes of the MLG, which are depended on relationships between the speed of the rotor rotation, value of the stiffness provided by a contactless suspension and the rotor shape are considered. In particular, it is showed that decreasing the stiffness of the contactless suspension leads to two operating modes of the gyroscope, which are defined by the rotor shape. Moreover, an error model of the MLG for a closed loop is obtained, which allows us to give an explanation of the error-producing mechanics of the inherent errors of the MLG.