Title :
Experimental Extraction of Effective Refractive Index and Thermo-Optic Coefficients of Silicon-on-Insulator Waveguides Using Interferometers
Author :
Dwivedi, Sarvagya ; Ruocco, Alfonso ; Vanslembrouck, Michael ; Spuesens, Thijs ; Bienstman, Peter ; Dumon, Pieter ; Van Vaerenbergh, Thomas ; Bogaerts, Wim
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Ghent, Belgium
Abstract :
We propose and demonstrate an accurate method of measuring the effective refractive index and thermo-optic coefficient of silicon-on-insulator waveguides in the entire C-band using three Mach-Zehnder interferometers. The method allows for accurate extraction of the wavelength dispersion and takes into account fabrication variability. Wafer scale measurements are performed and the effective refractive index variations are presented for three different waveguide widths: 450, 600, and 800 nm, for the TE polarization. The presented method is generic and can be applied to other waveguide geometries and material systems and for different wavelengths and polarizations.
Keywords :
Mach-Zehnder interferometers; integrated optoelectronics; light polarisation; optical dispersion; optical fabrication; optical waveguides; refractive index measurement; silicon-on-insulator; thermo-optical effects; C-band; Mach-Zehnder interferometers; Si; TE polarization; effective refractive index measurements; fabrication variability; silicon-on-insulator waveguides; size 450 nm; size 600 nm; size 800 nm; thermo-optic coefficients; wafer scale measurements; waveguide width; wavelength dispersion; Indexes; Optical device fabrication; Optical waveguides; Refractive index; Silicon; Wavelength measurement; Effective refractive index; Waveguides; Wavelength filtering devices; effective refractive index; thermo-optic coefficients; waveguides; wavelength filtering devices;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2015.2476603
