Novel Approaches to Optimizing Carrier Logistics in Semiconductor Manufacturing

This paper provides an overview of new approaches for assessing and addressing requirements for carrier logistics in semiconductor manufacturing and discusses solutions for optimizing the efficiency of capital equipment installed in the fab. An exploration of crucial influencing factors (both on the material handling as well as on the equipment side) will be followed by a discussion of different approaches to the challenges and an assessment of the impact of the proposed improvements. This paper also demonstrates how effective equipment throughput can be improved by the proposed methods.