• DocumentCode
    3607653
  • Title

    MEMS-based tunable meander inductor

  • Author

    Khan, F. ; Zhu, Y. ; Lu, J. ; Pal, J.

  • Author_Institution
    Queensland Micro-&-Nanotechnol. Centre (QMNC), Brisbane, QLD, Australia
  • Volume
    51
  • Issue
    20
  • fYear
    2015
  • Firstpage
    1582
  • Lastpage
    1583
  • Abstract
    A novel MEMS-based tunable meander inductor is reported. The inductor is fabricated using a single metal layer in a low-cost commercially available Metal-MUMPs™ process. The mutual inductance of the meander inductor is tuned by changing the gaps between the meander turns using a chevron-type thermal actuator. An air trench underneath the inductor has been made to reduce the loss in the silicon substrate and improve quality factor (Q-factor). Tuning range of ~50.8% and maximum Q-factor of 8.17 have been achieved at 5.79 GHz by stretching the meander inductor for 22 μm. The total footprint of the device is 0.58 mm2.
  • Keywords
    Q-factor; actuators; inductors; micromechanical devices; Chevron-type thermal actuator; MEMS-based tunable meander inductor; Q-factor; air trench; frequency 5.79 GHz; low-cost commercially available Metal-MUMPs process; mutual inductance; quality factor; silicon substrate loss; single metal layer;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2015.2495
  • Filename
    7289504
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3607653