DocumentCode :
3607936
Title :
The Evolution of Discharge Mode Transition in Helicon Plasma Through ICCD Images
Author :
Chao Ma ; Gao Zhao ; Yu Wang ; Zhongwei Liu ; Lijun Sang ; Chen Qiang
Author_Institution :
Lab. of Plasma Phys. & Mater., Beijing Inst. of Graphic Commun., Beijing, China
Volume :
43
Issue :
10
fYear :
2015
Firstpage :
3702
Lastpage :
3706
Abstract :
We employed integrated capacitively coupled detector (ICCD) as a novel diagnostic technology to distinguish the mode transitions in helicon plasma by taking evolution discharge images. Prior to characterizing the helicon plasma with Boswell type antenna, the Langmuir electrostatic probe diagnostic was performed, which affirmed the discharge mode transition by the jumped plasma density. The optical emission spectroscopy (OES) measurement in the same Ar plasma also confirmed these results. In the ICCD evolution images, it was observed that when the first mode transition appeared, the glow area moved from two sides of the tube to one side; subsequently, it moved to the center of the discharge tube when the second mode transition appeared, which was consistent with the results by Langmuir probe and OES. We also noted that with ICCD, the influence from endplates and process parameters, such as gas pressure, magnetic field, and RF power, on the helical discharge mode transition can be recognized.
Keywords :
CCD image sensors; Langmuir probes; antennas in plasma; argon; glow discharges; plasma density; plasma magnetohydrodynamics; plasma pressure; Ar; Ar plasma; Boswell type antenna; ICCD images; Langmuir electrostatic probe diagnostic; OES; RF power; diagnostic technology; discharge images; discharge tube; endplates; gas pressure; glow area; helical discharge mode transition; helicon plasma; integrated capacitively coupled detector; jumped plasma density; magnetic field; optical emission spectroscopy measurement; process parameters; second mode transition; Discharges (electric); Electron tubes; Magnetic resonance imaging; Plasma measurements; Plasmas; Probes; Radio frequency; Discharge image; helicon plasma; integrated capacitively coupled detector (ICCD); mode transition;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2015.2474405
Filename :
7293792
Link To Document :
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