Survey on Run-to-Run Control Algorithms in High-Mix Semiconductor Manufacturing Processes

Recently, to ensure product quality in high-mix semiconductor manufacturing processes, run-to-run (R2R) control algorithms have received increasing attention. Difficult challenges have been met with new and advanced approaches that address the real-world operating conditions exhibited in high-mix production environments (e.g., different products with different frequencies and high numbers of threads). In this paper, various proposed controllers for high-mix semiconductor manufacturing processes are surveyed from an application and theoretical point of view. Remaining challenges and directions for future work are also summarized with the intent of drawing attention to these problems in the systems and process control communities.