Title :
An Analytic Surface-Field-Based Quasi-Atomistic Model for Nanowire MOSFETs With Random Dopant Fluctuations
Author :
Chuyang Hong ; Qi Cheng ; Pu Wang ; Wei Meng ; Libo Yang ; Kuo, James B. ; Yijian Chen
Author_Institution :
Shenzhen Grad. Sch., Sch. of Electron. & Comput. Eng., Peking Univ., Shenzhen, China
Abstract :
For the first time, an analytic surface-field-based model for nanowire MOSFETs with random dopant fluctuations (RDF) is reported. In this model, the depletion charge due to the discrete dopant distribution is described by the Dirac δ functions, while the mobile charge keeps its continuous form. By introducing two new variables, the discrete 1-D Poisson´s equation is transformed into a simple algebraic equation to correlate the surface potential with the field (due to the inversion charge). Without solving the potential distribution, the drain current can be calculated from the Pao-Sah integral using the oxide-interface boundary condition. This model is shown to be more accurate in predicting the RDF effects than the continuous TCAD simulations for all the operating regions. We also discuss the RDF-incorporated short-channel effects by solving the discrete 2-D Poisson´s equation in the subthreshold regime.
Keywords :
MOSFET; Poisson equation; algebra; nanowires; semiconductor device models; Dirac δ functions; Pao-Sah integral; RDF effects; RDF-incorporated short-channel effects; TCAD simulation; algebraic equation; analytic surface-field-based quasiatomistic model; depletion charge; discrete 1D Poisson equation; discrete 2D Poisson equation; drain current; inversion charge; mobile charge; nanowire MOSFET; oxide-interface boundary condition; potential distribution; random dopant fluctuation; subthreshold regime; surface potential; Doping; MOSFET; Mathematical model; Poisson equations; Semiconductor device modeling; Semiconductor process modeling; Subthreshold current; Dirac $delta$ function; Dirac δ function; discrete Poisson´s equation; discrete Poisson???s equation; random dopant fluctuations (RDFs); surface-field-based model; surface-field-based model.;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2015.2484838