Title :
Silicon resonant cavity enhanced UV flame detector
Author :
Z. Djuric;K. Radulovic;N. Trbojevic;A. Lazic
Author_Institution :
Inst. of Microelectron. Technol. & Single Crystals, Belgrade, Serbia
fDate :
6/24/1905 12:00:00 AM
Abstract :
The need for selectively sensitive UV photodetectors poses a requirement both for novel detector structures and for new materials and technologies to produce them. In this paper we consider, for the first time, a possibility to use resonant cavity enhanced detector structures with a silicon absorption layer to increase selectivity and speed of UV detectors. A special emphasis is given to the UV photodetectors used in flame detection.
Keywords :
"Silicon","Resonance","Fires","Photodetectors","Optical surface waves","Radiation detectors","Electromagnetic wave absorption","Semiconductor radiation detectors","Photodiodes","Surface treatment"
Conference_Titel :
Microelectronics, 2002. MIEL 2002. 23rd International Conference on
Print_ISBN :
0-7803-7235-2
DOI :
10.1109/MIEL.2002.1003184