Title :
Micromachined coplanar waveguide on GaAs based HFET heterostructures
Author :
M. Tomaska;T. Lalinsky;M. Krnac;M. Klasovity;Z. Mozolova;S. Hascik;I. Kostic
Author_Institution :
Fac. of Electr. Eng. & Inf. Technol., Slovak Univ. of Technol., Bratislava, Slovakia
fDate :
6/24/1905 12:00:00 AM
Abstract :
The design, fabrication and characterization of microwave transmission structures on thin composite semiconductor/dielectric substrates, technologically compatible with pseudomorphic HFETs, for micromechanical microwave transmitted power sensors are discussed. The AlGaAs/InGaAs/GaAs and InGaP/InGaAs/GaAs HFET structures as supporting layers of micromachined coplanar waveguides for low loss microwave power transmission are compared.
Keywords :
"Coplanar waveguides","Gallium arsenide","HEMTs","MODFETs","Semiconductor waveguides","Indium gallium arsenide","Fabrication","Dielectric substrates","Microwave technology","Micromechanical devices"
Conference_Titel :
Microwaves, Radar and Wireless Communications, 2002. MIKON-2002. 14th International Conference on
Print_ISBN :
83-906662-5-1
DOI :
10.1109/MIKON.2002.1017965
