• DocumentCode
    3613847
  • Title

    Experimental research of silicon flowmeters based on piezoresistance effect

  • Author

    V.A. Kolchuzhin;A.V. Nazin;A.V. Shaporin

  • Author_Institution
    Novosibirsk State Tech. Univ., Russia
  • Volume
    1
  • fYear
    2002
  • fDate
    6/24/1905 12:00:00 AM
  • Abstract
    The experimental results are presented for silicon flowmeter in a range of gas range 20 - 1000 1/h.
  • Keywords
    "Silicon","Piezoresistance","Piezoresistive devices","Bridge circuits","Pollution measurement","Resistors","Temperature dependence","Temperature distribution","Semiconductor device measurement","Heating"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials, 2002. Proceedings. 3rd Annual 2002 Siberian Russian Workshop on
  • Print_ISBN
    5-7782-0380-2
  • Type

    conf

  • DOI
    10.1109/SREDM.2002.1024321
  • Filename
    1024321
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3613847