DocumentCode
3614628
Title
Lattice gas cellular automaton modeling of surface roughening in homoepitaxial growth in nanowires
Author
A. Gerisch;A.T. Lawniczak;R.A. Budiman;H.E. Ruda;H. Fuks
Author_Institution
Dept. of Math. & Comput. Sci., Halle Univ., Germany
Volume
2
fYear
2003
fDate
6/25/1905 12:00:00 AM
Firstpage
1413
Abstract
Our research addresses the problem of bridging large time and length scale gaps in simulating atomistic processes during thin film deposition. We introduce a new simulation approach based on a discrete description of atoms so that the unit length scale coincides with the atomic diameter. The interaction between atoms is defined using a coarse-grained approach to boost the computation speed. This approach does not heavily sacrifice the atomistic details in order to study structural evolution of a growing thin film on time scales in the order of seconds and even minutes. Our approach is inspired by lattice gas cellular automata models for chemically reacting systems, where individual particles interact with surrounding through assumed local driving forces. For homoepitaxial thin film deposition, the local driving force is the propensity of an atom to establish as many chemical bonds as possible to the underlying substrate atoms when it executes surface diffusion. Simulation results of Si layers deposited on a flat Si(001) substrate are presented.
Keywords
"Lattices","Automata","Rough surfaces","Surface roughness","Nanowires","Atomic layer deposition","Computational modeling","Sputtering","Chemicals","Substrates"
Publisher
ieee
Conference_Titel
Electrical and Computer Engineering, 2003. IEEE CCECE 2003. Canadian Conference on
ISSN
0840-7789
Print_ISBN
0-7803-7781-8
Type
conf
DOI
10.1109/CCECE.2003.1226165
Filename
1226165
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