• DocumentCode
    3614719
  • Title

    Lattice stress gradient formation in oxide films deposited on substrates when used sputtering techniques

  • Author

    P. Sutta

  • Author_Institution
    Military Academy
  • fYear
    2002
  • fDate
    6/24/1905 12:00:00 AM
  • Firstpage
    139
  • Lastpage
    142
  • Keywords
    "Lattices","Sputtering","Zinc oxide","Optical films","Substrates","Semiconductor films","Capacitive sensors","Residual stresses","X-ray diffraction","Optical devices"
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
  • Print_ISBN
    0-7803-7418-5
  • Type

    conf

  • DOI
    10.1109/SIM.2002.1242742
  • Filename
    1242742
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3614719