3614722

Laser technology in the formation of AuPt and AuPtTi contacts

P. Machac;V. Myslik;V. Perina;J. Zlamal

Institute of Chemical Technology

2002

6/24/1905 12:00:00 AM

198

201

"Metallization","Annealing","Contact resistance","Gold","Ohmic contacts","Laser beams","Gallium arsenide","Schottky barriers","Power lasers","Electrical resistance measurement"

ieee

Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on

0-7803-7418-5

conf

10.1109/SIM.2002.1242755

1242755