DocumentCode :
3614723
Title :
The influence of glow-discharge cleaning of Ge/Pd-GaAs on the specific contact resistivity
Author :
J. Zlamal;V. Myslik;P. Machac
Author_Institution :
Institute of Chemical Technology in Prague
fYear :
2002
fDate :
6/24/1905 12:00:00 AM
Firstpage :
202
Lastpage :
205
Keywords :
"Cleaning","Conductivity","Substrates","Electrodes","Ohmic contacts","Sputter etching","Gallium arsenide","Partial discharges","Wet etching","Dry etching"
Publisher :
ieee
Conference_Titel :
Semiconducting and Insulating Materials, 2002. SIMC-XII-2002. 12th International Conference on
Print_ISBN :
0-7803-7418-5
Type :
conf
DOI :
10.1109/SIM.2002.1242756
Filename :
1242756
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3614723
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