Title :
Low temperature micro-calorimeters based on thick film resistors
Author :
M. Mach;A. Pietrikova;S. Gabani;V. Pavlik;K. Flachbart;A. Orendacova;M. Orendac
Author_Institution :
Dept. of Technol. in Electron., Tech. Univ. of Kosice, Slovakia
fDate :
6/25/1905 12:00:00 AM
Abstract :
In the contribution we describe the design and some characteristics of micro-calorimeters which contain temperature sensors based on thick film RuO/sub 2/ resistors and heaters made of Ag-Pd thick films. The calorimeters were prepared using screen printing technique on sapphire substrates, and are assigned for specific heat measurements of very small samples in temperature ranges 0.05-3 K and 1.5-15 K. Described are also the relaxation and dual-slope methods which are used to determine the heat capacity.
Keywords :
"Thick films","Resistors","Temperature sensors","Temperature distribution","Printing","Switches","Thermal conductivity","Physics","Sensor phenomena and characterization","Thermal sensors"
Conference_Titel :
Electronics Technology: Integrated Management of Electronic Materials Production, 2003. 26th International Spring Seminar on
Print_ISBN :
0-7803-8002-9
DOI :
10.1109/ISSE.2003.1260549
