The noise-equivalent magnetic induction spectral density of magnetic microsensors

By assimilating the MOSFET channel of almost constant depth with a Hall plate, the results obtained for the conventional Hall plates have been extended to MOS-Hall plates. In this paperwork based on the adequate models it is analysed the operating conditions, and are established the noise main characteristic for MOS Hall plates. By using the numerical simulation the values of the signal-to-noise ratio and the noise-equivalent magnetic induction spectral density for different structure devices are compared and it is also emphasized the way in which choosing the geometry and the material features allows getting high-performance sensors.