• DocumentCode
    3618391
  • Title

    Characterization of alternative gate dielectrics using electrical I-V and C-V measurements

  • Author

    K.Z. Ahmed

  • fYear
    2004
  • fDate
    6/26/1905 12:00:00 AM
  • Firstpage
    196
  • Lastpage
    196
  • Keywords
    "Capacitance-voltage characteristics","Dielectric measurements","Electric variables measurement","High K dielectric materials","Materials reliability","High-K gate dielectrics","Dielectric materials","Hafnium oxide","Tunneling","Atomic layer deposition"
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 2004 IEEE International
  • Print_ISBN
    0-7803-8517-9
  • Type

    conf

  • DOI
    10.1109/IRWS.2004.1422777
  • Filename
    1422777
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3618391