• DocumentCode
    3618392
  • Title

    High-K dielectrics: materials physics, instabilities, defects, and reliability

  • Author

    J.F. Conley

  • fYear
    2004
  • fDate
    6/26/1905 12:00:00 AM
  • Firstpage
    196
  • Lastpage
    196
  • Keywords
    "High-K gate dielectrics","High K dielectric materials","Physics","Materials reliability","Atomic layer deposition"
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 2004 IEEE International
  • Print_ISBN
    0-7803-8517-9
  • Type

    conf

  • DOI
    10.1109/IRWS.2004.1422778
  • Filename
    1422778
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3618392