• DocumentCode
    3618854
  • Title

    Real structure of sputtered yttrium oxide films with different oxygen content

  • Author

    P. Sutta;I. Novotny;L. Harmatha

  • fYear
    2004
  • fDate
    6/26/1905 12:00:00 AM
  • Firstpage
    61
  • Lastpage
    64
  • Keywords
    "Oxygen","Sputtering","Dielectric thin films","Substrates","X-ray scattering","Crystallization","Lattices","Optical films","Residual stresses"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
  • Print_ISBN
    0-7803-8335-7
  • Type

    conf

  • DOI
    10.1109/ASDAM.2004.1441158
  • Filename
    1441158
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3618854