3618861

2-D thermo-mechanical simulation of the membrane MEMS components

J. Chlpik;M. Drzik;T. Lalinsky

2004

6/26/1905 12:00:00 AM

319

322

"Thermomechanical processes","Biomembranes","Micromechanical devices","Thermal stresses","Gallium arsenide","Nonhomogeneous media","Analytical models","Photothermal effects","Thermal expansion","Shape measurement"

ieee

Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on

0-7803-8335-7

conf

10.1109/ASDAM.2004.1441225

1441225