Numerical simulation and optimisation of the vacuum microsensor

The main goal of the work was to design a reliable numerical model of the thin-film vacuum pressure sensor and afterwards perform the numerical optimisation in reference to the number of variables, which influence the sensor sensitivity and variability due to selected factors. The numerical model was verified experimentally and analytically which allowed for numerical model calibration to achieve the accurate results. The optimised design of the sensor is highly depended on laboratory experiments, which were costly and time consuming. Many experiments are required in order to find out the so-called optimal design. Additional factor, sometimes neglected is due to the designer experience, which play a vital role. However, in a case of advanced numerical tools it is possible to perform the reliable optimisation much quicker and cheaper. The presented prototyping procedure allowed for designing an optimal construction of the sensor including its sensitivity and robustness. The applied prototyping methods were based on combination of several quantitative tools such as experimental design, numerical simulations, design of experiments, optimisation analysis, and qualification methods and finally allowed to find out the optimal parameter values in order to achieve the linear response of the sensor in a vide range of pressures.