DocumentCode :
3619449
Title :
Measurement of Channel Length and Off-set Region Length for Off-set Gate MOSFETs
Author :
K. Terada;K. Tsuji;Y. Itoh;M. Takahashi
Author_Institution :
Hiroshima City University, Japan
fYear :
1997
fDate :
6/19/1905 12:00:00 AM
Firstpage :
652
Lastpage :
655
Keywords :
"Length measurement","MOSFETs","Threshold voltage","FETs","Data mining","Testing","National electric code","H infinity control","Impurities","Electrodes"
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
Type :
conf
DOI :
10.1109/ESSDERC.1997.194513
Filename :
1503443
Link To Document :
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