DocumentCode :
3619456
Title :
Piezoresistive bridge configuration for atomic force microscopy
Author :
R. Jumpertz;A. van der Hart;J. Schelten;O. Ohlsson;Th. Sulzbach;F. Saurenbach
Author_Institution :
Forschungszentrum J¨
fYear :
1997
fDate :
6/19/1905 12:00:00 AM
Firstpage :
680
Lastpage :
683
Keywords :
"Atomic force microscopy","Piezoresistance","Bridges","Resistors","Surface topography","Semiconductor device noise","Force sensors","Nanobioscience","Geometry","Thermal stresses"
Publisher :
ieee
Conference_Titel :
Solid-State Device Research Conference, 1997. Proceeding of the 27th European
Print_ISBN :
2-86332-221-4
Type :
conf
DOI :
10.1109/ESSDERC.1997.194520
Filename :
1503450
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3619456
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