DocumentCode
3619478
Title
Ledge-Thickness of InGaP Passivation-Layer on InGaP/GaAs Delta-Doped Single HBT´s
Author
W.-S. Lour;J.L. Hsieh;C.Y. Lia
Author_Institution
National Taiwan-Ocean University, Keelung, Taiwan
fYear
1998
fDate
6/20/1905 12:00:00 AM
Firstpage
528
Lastpage
531
Keywords
"Gallium arsenide","Heterojunction bipolar transistors","Passivation","Etching","Fabrication","Substrates","Current measurement","Voltage","RNA","Degradation"
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Print_ISBN
2-86332-234-6
Type
conf
Filename
1503605
Link To Document