DocumentCode
3619482
Title
Impact of constant current stressing procedure on Stress Induced Leakage current generation in thin oxides
Author
P. Riess;G. Ghibaudo;G. Pananakakis;J. Brini;G. Ghidini
Author_Institution
LPCS/ENSERG/INPG, Grenoble, France
fYear
1998
fDate
6/20/1905 12:00:00 AM
Firstpage
544
Lastpage
547
Keywords
"Leakage current","Delay effects","Stress measurement","Time measurement","Electrons","Carbon capture and storage","Microelectronics","CMOS technology","Current measurement","Thickness measurement"
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 1998. Proceeding of the 28th European
Print_ISBN
2-86332-234-6
Type
conf
Filename
1503609
Link To Document