• DocumentCode
    3619490
  • Title

    Electrochemical Membrane Actuation with Piezoresistive Position Control

  • Author

    A. Gotz;C. Cane

  • Author_Institution
    Centro Nacional de Microelectronica, Bellaterra, Barcelona, Spain
  • fYear
    1998
  • fDate
    6/20/1905 12:00:00 AM
  • Firstpage
    576
  • Lastpage
    579
  • Keywords
    "Biomembranes","Piezoresistance","Position control","Silicon","Electrodes","Bridge circuits","Piezoresistive devices","Actuators","Hydrogen","Nickel"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 1998. Proceeding of the 28th European
  • Print_ISBN
    2-86332-234-6
  • Type

    conf

  • Filename
    1503617
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619490