DocumentCode
3619520
Title
Water-Assisted Positive Ion Contamination Resulting in Charge Loss in Nonvolatile Memories
Author
P. Gassot;A. Iline;E. De Backer;M. Tack;D. Wellekens;J. Van Houdt;L. Haspeslagh
Author_Institution
Alcatel Microelectronics, Oudenaarde, Belgium
fYear
2000
fDate
6/22/1905 12:00:00 AM
Firstpage
268
Lastpage
271
Keywords
"Contamination","Nonvolatile memory","Silicon compounds","Passivation","CMOS technology","Threshold voltage","Temperature","CMOS process","Tin","Microelectronics"
Publisher
ieee
Conference_Titel
Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Print_ISBN
2-86332-248-6
Type
conf
DOI
10.1109/ESSDERC.2000.194766
Filename
1503696
Link To Document