• DocumentCode
    3619546
  • Title

    High Reproducible Ideal SiC Schottky Rectifiers by Controlling Surface Preparation and Thermal Treatments

  • Author

    F. Roccaforte;F. La Via;V. Raineri

  • Author_Institution
    CNR-IMM, Catania, Italy
  • fYear
    2002
  • fDate
    6/24/1905 12:00:00 AM
  • Firstpage
    543
  • Lastpage
    546
  • Keywords
    "Silicon carbide","Rectifiers","Surface treatment","Schottky diodes","Dry etching","Wet etching","Annealing","Thermal conductivity","Fabrication","Schottky barriers"
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Device Research Conference, 2002. Proceeding of the 32nd European
  • Print_ISBN
    88-900847-8-2
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2002.194988
  • Filename
    1503918
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3619546