3619661

Quasi-Non Volatile Flatband-Voltage Shift in Metal-Oxide-Semiconductor Capacitors with Silicon-Rich-Oxide Dielectric

M. Rosmeulen;E. Sleeckx;K. De Meyer

IMEC, Leuven, Belgium and KU Leuven, Belgium

2001

6/23/1905 12:00:00 AM

383

386

"Dielectrics","Silicon","Capacitance-voltage characteristics","MOS capacitors","Voltage","Hysteresis","Random access memory","Nanocrystals","Fluid flow","Microelectronics"

ieee

Solid-State Device Research Conference, 2001. Proceeding of the 31st European

2-914601-01-8

conf

10.1109/ESSDERC.2001.195281

1506663