مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

3619697

Title :

C-MEMS and C-NEMS

Author :

M. Madou

Author_Institution :

University of California at Irvine

fYear :

2004

fDate :

6/26/1905 12:00:00 AM

Firstpage :

186

Lastpage :

186

Keywords :

"Resists","Organic materials","Batteries","Lithography","Electrodes","Nanobioscience","DNA","Sensor arrays","Temperature","Micromechanical devices"

Publisher :

ieee

Conference_Titel :

MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on

Print_ISBN :

0-7695-2189-4

Type :

conf

DOI :

10.1109/ICMENS.2004.1508943

Filename :

1508943

Link To Document :