3620023

The Design and Application of Electromechanical Single Silicon Beam Filters

M.F. Hribsek

1979

6/1/1905 12:00:00 AM

173

175

"Silicon","Band pass filters","Structural beams","Low pass filters","Resonant frequency","Resonance","Aluminum","Transducers","Bridge circuits","Vibrations"

ieee

33rd Annual Symposium on Frequency Control. 1979

conf

10.1109/FREQ.1979.200311

1537251