• DocumentCode
    3620336
  • Title

    Integrated polymeric Mach Zehnder interferometer for biosensing applications

  • Author

    R. Muller;D. Esinenco;M. Kusko;P. Obreja;E. Manea;O. Ligor;D. Apostol;V. Damian;M. Mateescu;L. Moldovan;L. Tcacenco;S.D. Psoma;A. Schneider;E. Huq

  • Volume
    1
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    227
  • Abstract
    A relatively new and simple way to realize integrated optical waveguides is to use polymeric materials. We propose an integrated optical biosensor based on negative photoresist SU-8 and positive photoresist. A Mach-Zehnder architecture was chosen for the sensor. Design, simulations, using Opti-FDTD software tools and preliminary fabrication experiments were presented.
  • Keywords
    "Biosensors","Optical interferometry","Optical polymers","Biomedical optical imaging","Integrated optics","Optical sensors","Optical waveguides","Resists","Application software","Biological materials"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference, 2005. CAS 2005 Proceedings. 2005 International
  • Print_ISBN
    0-7803-9214-0
  • Type

    conf

  • DOI
    10.1109/SMICND.2005.1558754
  • Filename
    1558754
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3620336