DocumentCode

3621143

Title

Thickness shear mode vibrations in silicon bar resonators

Author

H. Chandrahalim;D. Weinstein;S.A. Bhave

Volume

2

fYear

2005

fDate

6/27/1905 12:00:00 AM

Firstpage

898

Lastpage

901

Keywords

"Silicon","Impedance","Electrodes","Frequency","Voltage","Capacitive sensors","Q factor","Dielectric thin films","Tuning","Micromechanical devices"

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1602995

Filename

1602995