مرکز منطقه ای اطلاع رساني علوم و فناوري - Thickness shear mode vibrations in silicon bar resonators

DocumentCode :

3621143

Title :

Thickness shear mode vibrations in silicon bar resonators

Author :

H. Chandrahalim;D. Weinstein;S.A. Bhave

Volume :

fYear :

2005

fDate :

6/27/1905 12:00:00 AM

Firstpage :

898

Lastpage :

901

Keywords :

"Silicon","Impedance","Electrodes","Frequency","Voltage","Capacitive sensors","Q factor","Dielectric thin films","Tuning","Micromechanical devices"

Publisher :

ieee

Conference_Titel :

Ultrasonics Symposium, 2005 IEEE

ISSN :

1051-0117

Print_ISBN :

0-7803-9382-1

Type :

conf

DOI :

10.1109/ULTSYM.2005.1602995

Filename :

1602995

Link To Document :