3621203

A micromachined ultrasonic atomizer based on a liquid horn structure

J.M. Meacham;M.J. Varady;A.G. Fedorov;F.L. Degertekin

2

2005

6/27/1905 12:00:00 AM

1155

1159

"Silicon","Acoustic waves","Focusing","Dry etching","Wet etching","US Department of Defense","Fabrication","Piezoelectric transducers","Reservoirs","Plasma applications"

ieee

Ultrasonics Symposium, 2005 IEEE

1051-0117

0-7803-9382-1

conf

10.1109/ULTSYM.2005.1603055

1603055